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Using consistent, controlled cleaning processes, established global infrastructure and advanced coating techniques, Precision Cleaning and Coating delivers optimized parts cleaning services to lower the overall cleaning cost and chamber cost of ownership. Cleaning methods are precisely documented and validated through extensive chamber performance and analytical testing. High quality cleaning standards are maintained through on-going monitoring and stringent control of process, environment and equipment. In addition, the segregation of parts ensures the cleanliness and integrity of cleaning processes. Precision Cleaning and Coating services a wide range of process chamber types, including etch, CVD, ALD, PVD, and EPI/RTP.
- Consistent cleaning process
- OEM qualified best known methods
- Cleaning results match new part specifications
- Meets defects density needs for <90nm technology node
- Global infrastructure
- ISO 9001 certified
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